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Tech war: Chinese researchers claim breakthrough in advanced lithography materials

✍️ Ann Cao 📅 October 27, 2025 10:00 PM 🕐 Scraped: October 28, 2025

Summary: Paper published in Nature details breakthrough in understanding of photoresist materials, which should improve defect control and yield.

Chinese researchers claim to have achieved a key breakthrough in lithography technology in the latest step in the country’s effort to achieve self-sufficiency with advanced chips.

A group of scientists from Peking University, al

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Author

Ann Cao

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🌍 South China Morning Post

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Published Date

October 27, 2025 at 10:00 PM

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